Effect of implant temperature on secondary defects created by MeV Sn implantation is silicon
Citation
Wong Leung, Y, Jagadish, C, Conway, M et al. 2001, 'Effect of implant temperature on secondary defects created by MeV Sn implantation is silicon', Journal of Applied Physics, vol. 89, pp. 2556-2559.Year
2001ANU Authors
Field of Research
- Metals And Alloy Materials