The crystallisation of deep amorphous wells in silicon produced by ion implantation

Citation

Liu, A, McCallum, J & Wong Leung, Y 2001, 'The crystallisation of deep amorphous wells in silicon produced by ion implantation', Nuclear Instruments and Methods in Physics Research: Section B, vol. 175-177, pp. 164-168.

Year

2001

ANU Authors

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

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