Efficiency of dislocations and cavities for gettering of Cu and Fe in silico
Citation
Stritzker, B, Petravic, M, Wong Leung, Y et al 2001, 'Efficiency of dislocations and cavities for gettering of Cu and Fe in silicon', Nuclear Instruments and Methods in Physics Research: Section B, vol. 175-177, pp. 154-158.Year
2001Field of Research
- Electrical And Electronic Engineering Not Elsewhere Classified
