Oxygen diffusion in TiO2 films studied by electron and ion Rutherford backscattering

Citation

Marmitt, G,; Nandi, S.; Venkatachalam, D.; Elliman, R.; Vos, M. & Grande, P. 2017, 'Oxygen diffusion in TiO2 films studied by electron and ion Rutherford backscattering', Thin Solid Films, vol. 629, pp. 97-102.

Year

2017

ANU Authors

Field of Research

  • Atomic And Molecular Physics

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