Wafer-level flame-spray-pyrolysis deposition of gas-sensitive layers on microsensors

Citation

Kuhne, S, Graf, M, Tricoli, A et al 2008, 'Wafer-level flame-spray-pyrolysis deposition of gas-sensitive layers on microsensors', Journal of Micromechanics and Microengineering, vol. 18, no. 3, p. 035040.

Year

2008

ANU Authors

Fields of Research

  • Functional Materials
  • Nanofabrication, Growth And Self Assembly

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