Formation and characterization of Ta2O5/TaOx films formed by O ion implantation

Citation

Ruffell, S, Kurunczi, P, England, J et al. 2013, 'Formation and characterization of Ta2O5/TaOx films formed by O ion implantation', Nuclear Instruments and Methods in Physics Research: Section B, vol. 307, pp. 491-494.

Year

2013

ANU Authors

Fields of Research

  • Surfaces And Structural Properties Of Condensed Matter
  • Functional Materials

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