Mass Effects on Regrowth Rates and Activation Energies of Solid-Phase Epitaxy Induced by Ion Beams in Silicon
Citation
Kinomura, A, Williams, J & Fujii, K 1999, 'Mass Effects on Regrowth Rates and Activation Energies of Solid-Phase Epitaxy Induced by Ion Beams in Silicon', Physical Review B, vol. 59, no. 23, pp. 15 214-15 224.Year
1999ANU Authors
Field of Research
- Plasma Physics; Fusion Plasmas; Electrical Discharges