Germanium-on-Insulator Fabricated by Ion Implantation and Dry Oxidation Technique

Citation

Choi, D, Luther-Davies, B, Kim, T et al. 2011, 'Germanium-on-Insulator Fabricated by Ion Implantation and Dry Oxidation Technique', IEEE Conference on Nanotechnology (IEEE-NANO 2011), IEEE Nanotechnology, Portland USA, pp. 1668 - 1672.

Year

2011

ANU Authors

Field of Research

  • Lasers And Quantum Electronics

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