Passivation of highly boron doped silicon surfaces by sputtered AlOx and PECVD SiN, a comparison
Citation
Li, T, Cuevas, A, Tan, J et al. 2010, 'Passivation of highly boron doped silicon surfaces by sputtered AlOx and PECVD SiN, a comparison', Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD 2010), ed. H. Hoe Tan, Institute of Electrical and Electronics Engineers (IEEE Inc), Australia, pp. 125-126.Year
2010ANU Authors
Field of Research
- Photodetectors, Optical Sensors And Solar Cells
