Reactive ion etching of tellurite and chalcogenide waveguides using hydrogen, methane, and argon

Citation

Vu, K & Madden, S 2011, 'Reactive ion etching of tellurite and chalcogenide waveguides using hydrogen, methane, and argon', Journal of Vacuum Science and Technology A, vol. 29, no. 1, pp. 011023-6.

Year

2011

ANU Authors

Fields of Research

  • Nonlinear Optics And Spectroscopy
  • Photonics, Optoelectronics And Optical Communications
  • Nanofabrication, Growth And Self Assembly

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