Thermal expansion coefficients and composition of sputter-deposited silicon oxynitride thin films

Citation

McKerracher, I, Fu, L, Tan, H et al. 2010, 'Thermal expansion coefficients and composition of sputter-deposited silicon oxynitride thin films', Journal of Physics D: Applied Physics, vol. 43, no. 33, p. 8.

Year

2010

ANU Authors

Field of Research

  • Condensed Matter Physics Not Elsewhere Classified

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