High index contrast polysiloxane waveguides fabricated by dry etching
Citation
Madden, S, Zhang, Y, Choi, D et al. 2009, 'High index contrast polysiloxane waveguides fabricated by dry etching', Journal of Vacuum Science and Technology A, vol. 27, no. 3, pp. 561 - 565.Year
2009Field of Research
- Photonics And Electro Optical Engineering (Excl. Communications)