Negative ions in single and dual frequency capacitively coupled fluorocarbon plasmas Yes

Citation

Curley, G, Maric, D, Booth, J et al 2007, 'Negative ions in single and dual frequency capacitively coupled fluorocarbon plasmas Yes', Plasma Sources Science and Technology, vol. 16, pp. S87-S93.

Year

2007

ANU Authors

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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