Effect of oxygen concentration on nanoindentation-induced phase transformations in ion-implanted amorphous silicon
Citation
Ruffell, S, Vedi, J, Bradby, J et al. 2009, 'Effect of oxygen concentration on nanoindentation-induced phase transformations in ion-implanted amorphous silicon', Journal of Applied Physics, vol. 105, no. 083520, pp. 1-6.Year
2009ANU Authors
Field of Research
- Condensed Matter Physics Not Elsewhere Classified