Measurement of the damage profile of ion-implanted GaAs using an automated optical profiler
Citation
Gal, M, Wengler, M, Ilyas, S et al. 2001, 'Measurement of the damage profile of ion-implanted GaAs using an automated optical profiler', Nuclear Instruments and Methods in Physics Research: Section B, vol. 173, pp. 528-532.Year
2001ANU Authors
Field of Research
- Plasma Physics; Fusion Plasmas; Electrical Discharges