Gettering of Copper to Hydrogen-induced Cavities in Multicrystalline Silicon
Citation
Kinomura, A, Horino, Y, Nakano, Y et al. 2005, 'Gettering of Copper to Hydrogen-induced Cavities in Multicrystalline Silicon', Journal of Applied Physics, vol. 98, no. 6, pp. 066102-1-3.Year
2005ANU Authors
Field of Research
- Electrical And Electronic Engineering Not Elsewhere Classified