Ion Beam Induced Epitaxy Experiments in Silicon under Channeling and Random Alignments

Citation

Williams, J, Young, I & Conway, M 2000, 'Ion Beam Induced Epitaxy Experiments in Silicon under Channeling and Random Alignments', Nuclear Instruments and Methods in Physics Research: Section B, vol. 161-163, pp. 505-509.

Year

2000

ANU Authors

Field of Research

  • Optical Networks And Systems

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