Optical and thermomechanical properties of plasma-enhanced CVD silicon dioxide films upon annealing

Citation

Choi, D, You, K, Guessel, S et al 2004, 'Optical and thermomechanical properties of plasma-enhanced CVD silicon dioxide films upon annealing', SPIE Integrated Optics Conference 2004, ed. Yakov Sidorin and Ari Tervonen, SPIE - The International Society for Optical Engineering, USA.

Year

2004

ANU Authors

Field of Research

  • Optical Physics Not Elsewhere Classified

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