Plasma etching of As2S3 films for optical waveguides
Citation
Choi, D, Madden, S, Rode, A et al. 2008, 'Plasma etching of As2S3 films for optical waveguides', Journal of Non-crystalline Solids, vol. 354, no. 27, pp. 3179 - 3183.Year
2008ANU Authors
Field of Research
- Surfaces And Structural Properties Of Condensed Matter