Indentification of nanoindentation-induced phase changes in silicon by in situ electrical characterization

Citation

Ruffell, S, Bradby, J, Fujisawa PhD, N et al. 2007, 'Indentification of nanoindentation-induced phase changes in silicon by in situ electrical characterization', Journal of Applied Physics, vol. 101, pp. 083531 1-7.

Year

2007

ANU Authors

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

Updated:  05 July 2024 / Responsible Officer:  Director (Research Services Division) / Page Contact:  Researchers