Characterization of the Si-SiO2 Interface Following Room Temperature Ammonia Plasma Exposure
Citation
Jin, H, Weber, K & Smith, P 2007, 'Characterization of the Si-SiO2 Interface Following Room Temperature Ammonia Plasma Exposure', Journal of the Electrochemical Society, vol. 154, no. 6, pp. H417-H421.Year
2007ANU Authors
Fields of Research
- Manufacturing Engineering Not Elsewhere Classified
- Materials Engineering Not Elsewhere Classified