Depth profiling of ion-implanted samples by high-energy electron scattering
Citation
Trombini, H, Vos, M, Elliman, R et al. 2020, 'Depth profiling of ion-implanted samples by high-energy electron scattering', Journal of Physics D: Applied Physics, vol. 53.Year
2020Field of Research
- Condensed Matter Characterisation Technique Development