CMOS compatible fabrication of micro, nano convex silicon lens arrays by conformal chemical vapor deposition
Citation
Zuo, H, Choi, D, Gai, X et al 2017, 'CMOS compatible fabrication of micro, nano convex silicon lens arrays by conformal chemical vapor deposition', Optics Express, vol. 25, no. 4, pp. 3069-3076.Year
2017Fields of Research
- Nanophotonics
- Nanofabrication, Growth And Self Assembly
