Phosphorus diffused LPCVD polysilicon passivated contacts with in-situ low pressure oxidation
Citation
Fong, K, Kho, T, Liang, W et al. 2018, 'Phosphorus diffused LPCVD polysilicon passivated contacts with in-situ low pressure oxidation', Solar Energy Materials and Solar Cells, vol. 186, pp. 236-242.Year
2018ANU Authors
Field of Research
- Photodetectors, Optical Sensors And Solar Cells