Nanoscale Structuring in Confined Geometries using Atomic Layer Deposition: Conformal Coating and Nanocavity Formation

Citation

Ruff, P, Carrillo-Solano, M, Ulrich, N et al 2018, 'Nanoscale Structuring in Confined Geometries using Atomic Layer Deposition: Conformal Coating and Nanocavity Formation', Zeitschrift fur Physikalische Chemie, vol. 232, no. 7-8, pp. 1147-1171.

Year

2018

ANU Authors

Fields of Research

  • Surfaces And Structural Properties Of Condensed Matter
  • Nanofabrication, Growth And Self Assembly
  • Nanoscale Characterisation

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