Reduction of Cross-coupling between X-Y Axes of Piezoelectric Scanner Stage of Atomic Force Microscope for Faster Scanning
Citation
Habibullah, H, Pota, H, Petersen, I et al. 2013, 'Reduction of Cross-coupling between X-Y Axes of Piezoelectric Scanner Stage of Atomic Force Microscope for Faster Scanning', International Conference on Control Applications, CCA 2013, IEEE, Piscataway, New Jersey, US, pp. 455-460pp.Year
2013ANU Authors
Field of Research
- Engineering Not Elsewhere Classified