Quantification of germanium-induced suppression of interstitial injection during oxidation of silicon
Citation
Martin, T, Jones, K, Camillo-Castillo, R et al. 2017, 'Quantification of germanium-induced suppression of interstitial injection during oxidation of silicon', Journal of Materials Science, vol. 52, no. 17, pp. 10387-10392.Year
2017ANU Authors
Field of Research
- Metals And Alloy Materials