Fabrication of Ge On Insulator By Ion-Implantation And Dry Oxidation Techniques
Citation
Kim, T, Belay, K, Llewellyn, D et al. 2012, 'Fabrication of Ge On Insulator By Ion-Implantation And Dry Oxidation Techniques', Microscopy and Microanalysis, vol. 18, no. S2, pp. 1634-1635.